1.

Conference Proceedings

Conference Proceedings
Lercel, M.J. ; Fisch, E. ; Racette, K.C. ; Lawliss, M. ; Williams, C. T. ; Kindt, L. ; Huang, C.
Pub. info.: 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.18-22,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4764
2.

Conference Proceedings

Conference Proceedings
Thiel, C.W. ; Kindt, L. ; Lawliss, M.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.1133-1142,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
3.

Conference Proceedings

Conference Proceedings
Thiel, C. ; Racette, K.C. ; Fisch, E. ; Lawliss, M. ; Kindt, L. ; Huang, C. ; Ackel, R. ; Levy, M.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.339-346,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
4.

Conference Proceedings

Conference Proceedings
Racette, K.C. ; Williams, C.T. ; Fisch, E. ; Kindt, L. ; Lawliss, M. ; Ackel, R. ; Lercel, M.J.
Pub. info.: Emerging Lithographic Technologies VI.  Part One  pp.161-172,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
5.

Conference Proceedings

Conference Proceedings
Benes, Z. ; Deverich, C. ; Huang, C. ; Lawliss, M.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.1027-1033,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
6.

Conference Proceedings

Conference Proceedings
Lercel, M.J. ; Williams, C.T. ; Lawliss, M. ; Ackel, R. ; Kindt, L. ; Fisch, E.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.790-798,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754