1.

Conference Proceedings

Conference Proceedings
Dokumaci, O. ; Law, M.E.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.37-43,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4
2.

Conference Proceedings

Conference Proceedings
Law, M.E.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.18-26,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4
3.

Conference Proceedings

Conference Proceedings
Lindfors, C.D. ; Jones, K.S. ; Law, M.E. ; Downey, D.F. ; Murto, R.W.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B10.1-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
4.

Conference Proceedings

Conference Proceedings
Jones, K.S. ; Banisaukis, H. ; Earles, S. ; Lindfors, C. ; Griglione, M. ; Law, M.E. ; Taiwar, S. ; Falk, S.W. ; Downey, D.F. ; Agarwal, A.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.119-128,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
5.

Conference Proceedings

Conference Proceedings
Jacques, J.M. ; Burbure, N. ; Jones, K.S. ; Law, M.E. ; Robertson, L.S. ; Downey, D.F. ; Rubin, L.M. ; Bennett, J. ; Beebe, M. ; Klimov, M.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.443-448,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
6.

Conference Proceedings

Conference Proceedings
Camarce, C. ; Radic, L. ; Keys, P. ; Brindos, R ; Jones, K.S. ; Law, M.E.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669
7.

Conference Proceedings

Conference Proceedings
Saavedra, A.F. ; Jones, K.S. ; Radic, L. ; Law, M.E. ; Chan, K.K.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.357-362,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
8.

Conference Proceedings

Conference Proceedings
Phen, M.S. ; Crosby, R.T. ; Craciun, V. ; Jones, K.S. ; Law, M.E. ; Hansen, J.L. ; Larsen, A.N.
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.369-376,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864
9.

Conference Proceedings

Conference Proceedings
Lin, J. ; El Kouche, A. ; Law, M.E. ; Ren, F. ; Kang, B.S. ; Pearton, S.J. ; Norton, D. ; Abernathy, C.R.
Pub. info.: State-of-the-art program on compound semiconductors (SOTAPOCS XLII) and processes at the compound-semiconductor/solution interface : proceedings of the international symposia.  pp.449-460,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-04
10.

Conference Proceedings

Conference Proceedings
Crosby, R.T. ; Jones, K.S. ; Law, M.E. ; Saavedra, A.F. ; Hansen, J.L. ; Larsen, A.N. ; Liu, J.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.183-188,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810