Phen, M.S. ; Crosby, R.T. ; Craciun, V. ; Jones, K.S. ; Law, M.E. ; Hansen, J.L. ; Larsen, A.N.
Pub. info.:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.369-376, 2005. Warrendale, Pa.. Materials Research Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.183-188, 2004. Warrendale, Pa.. Materials Research Society