Diamond-based deep-UV sensors for lithography applications
- Author(s):
Whitfield,M.D. ( Exitech Ltd. ) Lansley,S.P. Gaudin,O. McKeag,R.D. Rizvi,N.H. Jackman,R.B. - Publication title:
- Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4274
- Pub. Year:
- 2001
- Page(from):
- 40
- Page(to):
- 47
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439529 [0819439525]
- Language:
- English
- Call no.:
- P63600/4274
- Type:
- Conference Proceedings
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