1.

Conference Proceedings
Conference Proceedings
1. Using Ion Beams to Modify Nanocrystalline Composites: Co Nanoparticles in Sapphire
Meldrum, A. ; Beaty, K.S. ; Lam, M. ; White, C.W. ; Zuhr, R.A. ; Boatner, L.A.
Pub. info.: Nanophase and nanocomposite materials IV : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A..  pp.413-420,  2002.  Wrrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 703
2.

Conference Proceedings
Conference Proceedings
2. Feature level test patterns for characterizing residual process effects
Neureuther, A.R. ; McIntyre, G.R. ; Gennari, F.E. ; Lam, M. ; Cain, J.P. ; Robins, G.C. ; Huang, E. ; Choi, J. ; Wang, L. ; Yuan, L. ; Oshima, H.
Pub. info.: Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA.  pp.76-84,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5379
3.

Conference Proceedings
Conference Proceedings
3. Polarization masks: concept and initial assessment
Lam, M. ; Neureuther, A.R.
Pub. info.: Optical Microlithography XV.  Part One  pp.437-445,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings
Conference Proceedings
4. Domain decomposition methods for simulation of printing and inspection of phase defects
Lam, M. ; Adam, K. ; Neureuther, A.R.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1492-1501,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
5.

Conference Proceedings
Conference Proceedings
5. Polarization contact: mask engineering
Lam, M. ; Neureuther, A.R.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.530-539,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889