1.

Conference Proceedings

Conference Proceedings
LaVan,D.A. ; Buchheit,T.E.
Pub. info.: MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California.  pp.40-44,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3880
2.

Conference Proceedings

Conference Proceedings
Pelt,J.S. ; Ramsey,M.E. ; Magana,R.,Jr. ; Poindexter,E.,Jr. ; Boer,M.P.de ; LaVan,D.A. ; Dugger,M.T. ; Smith,J.H. ; Durbin,S.M.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.76-84,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874