1.

Conference Proceedings

Conference Proceedings
Shimamura, T. ; Morimura, H. ; Unno, H. ; Fujii, K. ; Shigematsu, S. ; Machida, K. ; Kyuragi, H.
Pub. info.: Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia.  pp.23-30,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4593
2.

Conference Proceedings

Conference Proceedings
Douseki, T. ; Kyuragi, H.
Pub. info.: Silicon-on-insulator technology and devices XI : proceedings of the international symposium.  pp.209-214,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-5