Shimamura, T. ; Morimura, H. ; Unno, H. ; Fujii, K. ; Shigematsu, S. ; Machida, K. ; Kyuragi, H.
Pub. info.:
Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia. pp.23-30, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.209-214, 2003. Pennington, N.J.. Electrochemical Society