1.

Conference Proceedings
Conference Proceedings
1. A STUDY OF THE EFFECTS OF IMPLANTATION DOSE AND ANNEALING TEMPERATURE ON THE FORMATION OF BURIED NITRIDE SOI STRUCTURES
Kerger, M.B. ; Kwor, R. ; Zeller, M. ; Hemment, P.L.F. ; Reeson, K.J.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.603-608,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
2.

Conference Proceedings
Conference Proceedings
2. CHARACTERISTICS OF PALLADIUM THIN FILMS DEPOSITED BY THE IONIZED CLUSTER BEAM TECHNIQUE
Huffman, Maria ; Kalkur, T. S. ; Kammerdiner, L. ; Kwor, R. ; Levenson, L. L. ; Reeder, M.
Pub. info.: Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.75-80,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 239
3.

Conference Proceedings
Conference Proceedings
3. RAPID THERMAL ANNEALING OF ION IMPLANTED p-n JUNCTIONS IN SILICON
Ho, C.C. ; Kwor, R. ; Araujo, C. ; Gelpey, J.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.225-232,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
4.

Conference Proceedings
Conference Proceedings
4. COMPARISON OF THE GROWTH KINETICS OF OXIDES GROWN IN TUNGSTEN-HALOGEN AND WATER COOLED ARC LAMP SYSTEMS
Paz de Araujo, C. A. ; Gelpey, J. C. ; Huang, Y. P. ; Kwor, R.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.133-140,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92
5.

Conference Proceedings
Conference Proceedings
5. RAPID THERMAL ANNEALING OF COMPOSITE TaSi2/n+ POLY-Si SILICIDE FILMS
Kwong, D. L. ; Kwor, R. ; Tsaur, B-Y. ; Daneshvar, K.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.733-738,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23