1.

Conference Proceedings
Conference Proceedings
1. Device Fabrication and Evaluation of Alternative High-K Dielectrics and Gate Electrodes Using a Non-Self Aligned Gate process
Kim, I. ; Han, S.K. ; Kiether, W. ; Lee, S.J. ; Lee, C.H. ; Luan, H.F. ; Luo, Z. ; Rying, E. ; Wicaksana, Z.Wang D. ; Zhu, W. ; Hauser, J. ; Kiingon, A. ; Kwang, D.L. ; Ma, T.P. ; Maria, J.P. ; Misra, V. ; Osburn, C.M.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.211-220,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
2.

Conference Proceedings
Conference Proceedings
2. High Quality Ultra Thin HfO 2 Gate Stack Prepared by In-Situ RT-MOCVD Process
Lee, S.J. ; Luan, H.F. ; Bai, W.P. ; Lee, C.H. ; Clark, B. ; Rabents, D. ; Myers, L. ; Kwang, D.L.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.231-238,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9