Blank Cover Image

INVESTIGATION OF METAL INDUCED SURFACE DEFECTS IN CZOCHRALSKI Si FOLLOWING RAPID THERMAL PROCESSING BY THERMAL WAVE MODULATED REFLECTANCE METHOD

Author(s):
Hahn, S.
Smith, W. L.
Suga, H.
Park, J. G.
Lim, C. S.
Kwak, Y.-S.
Meinecke, R.
Kola, R. R.
Rozgonyi, G. A.
Kwack, K. D.
5 more
Publication title:
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
224
Pub. Year:
1991
Page(from):
81
Page(to):
88
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991187 [1558991182]
Language:
English
Call no.:
M23500/224
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Convetional and Rapid Thermal Annealing Induced Defects in Czochralski Silicon

Susi,E., Poggi,A., Fabbri,R., Lulli,G., Adegboyega,A.G.

Trans Tech Publications
7 Conference Proceedings Deep Level Transient Spectroscopy Study of Dislocations and Related Defects in SiGe/Si Heterostructures

J. Lu, Y. Park, G. Rozgonyi

Electrochemical Society
2 Conference Proceedings ELECTRICAL CHARACTERIZATION OF SILICON WITH BURIED DEFECTS

Honeycutt, J., Radzimski, Z., Kola, R. R., Salih, A. S. M., Rozgonyi, G. A.

Materials Research Society
8 Conference Proceedings In Situ Photoexcitation-Induced Suppression of Point Defect Generation in Ion Implanted Silicon

Cho, C. R., Yarykin, N., Rozgonyi, G. A., Zuhr, R. A.

MRS - Materials Research Society
3 Conference Proceedings DEFECT AND DOPANT CONTROL DURING SILICON EPITAXY USING B AND Ge

Kola, R. R., Posthill, J. B., Salih, A. S. M., Rozgonyi, G. A., Bean, K. E., Lindberg, K.

Materials Research Society
9 Conference Proceedings Structural modifications of amorphized silicon surfaces following picosecond laser irradiation

Rozgonyi, G.A., Baumgart, H., Phillipp, F., Uebbing, R., Oppolzer, H.

North Holland
4 Conference Proceedings SPECTROSCOPIC INVESTIGATION OF ARSENIC-INDUCED SURFACE DEFECTS IN HIGH-DOSE As+ IMPLANTED RAPID THERMAL ANNEALED SILICON

Kumar, R., Chaussemy, G., Roura, P., Laugier, A.

Materials Research Society
10 Conference Proceedings In Situ Deep Level Transient Spectroscopy of Defect Evolution in Silicon Following Ion Implantation at 80 K

Cho, C. R., Brown, R. A., Kononchuk, O., Yarykin, N., Rozgonyi, G., Zuhr, R.

MRS - Materials Research Society
5 Conference Proceedings Thermally Induced Dislocation and Slip Defects in Silicon

Cho, C.R., Kim, Y.S., Lee, J.K., Ko, S.W., Choi, D.J., Son, C.B., Stephens, A.E., Rozgonyi, G.A.

Electrochemical Society
11 Conference Proceedings COP Induced Isolation Failures in Cz Wafers

Lee, G.S., Kwack, K.D., Park, J.G., Park, J.M., Shim, T.H.

Electrochemical Society
6 Conference Proceedings The Role of Metal and Passivation Defects in Electromigration-Induced Damage in Thin Film Conductors

Lloyd, J. R., Smith, P. M., Prokop, G. S.

North-Holland
12 Conference Proceedings EFFECTS OF SILICON ION IMPLANTATION UPON THIN GATE OXIDE INTEGRITY

Lee, G.-S., Park, J. -G., Choi, S. -P., Shin, C.-H,, Sun, Y.-B, Kwak, Y.-S., Shin, C.-K., Smith, W. L., Hahn, S.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12