1.

Conference Proceedings

Conference Proceedings
Babin,S.V. ; Kuzmin,I.Yu.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.374-381,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
2.

Conference Proceedings

Conference Proceedings
Babin,S.V. ; Hudek,P. ; Kostic,I. ; Kuzmin,I.Yu.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.368-373,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
3.

Conference Proceedings

Conference Proceedings
Babin,S.V. ; Hudek,P. ; Kostic,I. ; Kuzmin,I.Yu.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.655-661,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
4.

Conference Proceedings

Conference Proceedings
Kuzmin,I.Yu.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.536-542,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
5.

Conference Proceedings

Conference Proceedings
Babin,S.V. ; Kuzmin,I.Yu. ; Sergeev,G.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.464-470,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236
6.

Conference Proceedings

Conference Proceedings
Babin,S.V. ; Kozunov,V.V. ; Kuzmin,I.Yu.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.520-526,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884