1.

Conference Proceedings
Conference Proceedings
1. Micromachined pressure gauge for the vacuum range based on damping of a resonator
Kurth,S. ; Hiller,K. ; Zichner,N. ; Mehner,J. ; Iwert,T. ; Biehl,S. ; Dotzel,W. ; Gessner,T.
Pub. info.: MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA.  pp.103-111,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4559
2.

Conference Proceedings
Conference Proceedings
2. Silicon mirror arrays fabricated by using bulk and surface micromachining
Gessner,T. ; Dotzel,W. ; Billep,D. ; Hahn,R. ; Kaufmann,C. ; Kehr,K. ; Kurth,S. ; Steiniger,C. ; Wollmann,U.
Pub. info.: Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California.  pp.296-305,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3008
3.

Conference Proceedings
Conference Proceedings
3. Micromirrors and micromirror arrays for scanning applicatoins
Gessner,T. ; Kurth,S. ; Kaufmann,C. ; Markert,J. ; Ehrlich,A. ; Dotzel,W.
Pub. info.: MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA.  pp.338-347,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4178
4.

Conference Proceedings
Conference Proceedings
4. Synchronously working micromirrors for beam steering:design and application aspects
Kurth,S. ; Kehr,K. ; Mehner,J. ; Kaufmann,C. ; Hahn,R. ; Seidel,R. ; Doetzei,W. ; Cessner,T.
Pub. info.: Optical scanning : design and applications : 21-22 July 1999, Denver, Colorado.  pp.63-73,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3787
5.

Conference Proceedings
Conference Proceedings
5. Analogously working micromirror arrays
Kehr,K. ; Kurth,S. ; Mehner,J. ; Kaufmann,C. ; Hahn,R. ; Dotzel,W. ; Gessner,T.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.80-89,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878
6.

Conference Proceedings
Conference Proceedings
6. Low-temperature approaches for fabrication of high-frequency microscanners
Hiller,K. ; Hahn,R. ; Kaufmann,C. ; Kurth,S. ; Kehr,K. ; Gessner,T. ; Dotzel,W. ; Wiemer,M. ; Schubert,I.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.58-66,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878