1.

Conference Proceedings
Conference Proceedings
1. Structural and electrical characterization of Si-MODFET structures grown at high rates by LEPECVD
Rosenblad, C. ; Kummer, M. ; Muller, E. ; Dommann, A. ; Kanel, H. Von
Pub. info.: Substrate engineering - paving the way to epitaxy : sympoisum held November 29-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.O7.9.1-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 587
2.

Conference Proceedings
Conference Proceedings
2. Magnetron Sputter Heteroepitaxy of Si1-xGex/Si(001): The Evolution of the Cross-Hatched Surface
Vogeli, B. ; Kummer, M. ; Kanel, H. von
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.203-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
3.

Conference Proceedings
Conference Proceedings
3. Si/Ge/Si(001) Magnetron Sputter Heteroepitaxy: The Initial Stages of｡ﾈHut"- Cluster Overgrowth
Vogeli, B. ; Kummer, M. ; Kanel, H. von
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.209-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
4.

Conference Proceedings
Conference Proceedings
4. Comparison Of Low Temperature Growth Of Si Thin Films On Amorphous Substrates By MBE And PECVD Methods
AnnaSelvan, J. A. ; Gobrecht, J. ; Grutzmacher, D. ; Kummer, M. ; Miiller, E. ; Rebien, M. ; vonKanel, H.
Pub. info.: Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A..  pp.A19.4-,  2001.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 609
5.

Conference Proceedings
Conference Proceedings
5. A posiible production technique for modulation doped SiGe heterostructures
Rosenblad, C. ; Kummer, M. ; Muller, E. ; Hackbarth, T. ; Kanel, H. von
Pub. info.: Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.141-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 585