1.

Conference Proceedings
Conference Proceedings
1. Nano-Mechanical Properties of SiLK Low-K Dielectric Material
Gonzalez, J.C. ; Silva, M.I.N. ; Kuhn, L. ; Griffis, D. ; Russell, P.E.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.351-358,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8
2.

Conference Proceedings
Conference Proceedings
2. Nanoindentation and Nanowear Studies of Sputter-Deposited Ultrathin Tin Oxide Films on Glass Substrates
Wang, J.G. ; Stahley, M.E. ; Pantano, C.G. ; Yang, D.H. ; Anderson, T. ; Kuhn, L.
Pub. info.: Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.85-90,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 695