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35 results

Conference Proceedings

1. Effects of laser bandwidth on OPE in a modern lithography tool [6154-36]

Huggins, K. ; Tsuyoshi, T. ; Ong, M. ; Rafac, R. ; Treadway, C. ; Choudhary, D. ; Kudo, T. ; Hirukawa, S. ; Renwick, S. P. ; Farrar, N. R.

Pub. info.:	Optical Microlithography XIX. pp.61540Z-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

Conference Proceedings

2. In Situ Growth-Stress Measurement of Cr2O3 Scale Formed on Stainless Steels by Raman Spectroscopy

Kitamura, K. ; Nishiyama, Y. ; Otsuka, N. ; Kudo, T.

Pub. info.:	High-temperature oxidation and corrosion 2005 : proceedings of the International Symposium on High-Temperature Oxidation and Corrosion 2005 , Nara, Japan, 30th November - 2nd December 2005. pp.489-496, 2006. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	522-523

Conference Proceedings

3. Versatility in lithographic performance of advanced 193 nm contact hole resist [6153-86]

Kudo, T. ; Lin, G. ; Lee, D. ; Rahman, D. ; Timko, A. ; Mckenzie, D. ; Anyadiegwu, C. ; Chiu, S. ; Houlihan, F. ; Rentkiewicz, D. ; Dammel, R. R. ; Padmanaban, M. ; Biafore, J.

Pub. info.:	Advances in Resist Technology and Processing XXIII. pp.61532C-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6153

Conference Proceedings

4. Proton conducting amorphous thin films fabricated from peroxo-polytungstates with acidic ligands: inorganic polymer electrolytes

Kudo, T. ; Hibino, M. ; Nakajima, H. ; Mizumo, N.

Pub. info.:	Proceedings of the Third International Symposium on Ionic and Mixed Conducting Ceramics. pp.8-16, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-24

Conference Proceedings

5. Titanium-Main Group Chemistry

Gordon, M.S. ; Bode, B.M. ; Kudo, T. ; Chung, G.

Pub. info.:	Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.1-9, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-23

Conference Proceedings

6. CATHODIC PERFORMANCE OF IN SITU OXIDIZED Ni+AI ALLOYS IN MOLTEN Li Na CARBONATE EUTECTIC

Hisamitsu, Y. ; Ono, Y. ; Mohamedi, M. ; Itoh, T. ; Tomezyk, P. ; Uchida, I. ; Kudo, T.

Pub. info.:	Carbonate fuel cell technology : proceedings of the fifth international symposium. pp.337-346, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-20

Conference Proceedings

7. A narrow-spectrum long-wavelength VCSEL using a fiber Bragg grating [6351-13]

Mizunami, T. ; Kojima, S. ; Kudo, T.

Pub. info.:	Passive Components and Fiber-based Devices III. pp.63510C-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6351

Conference Proceedings

8. Study of the effect of amine additives on LWR and LER [6153-44]

Houlihan, F. M. ; Rentkiewicz, D. ; Lin, G. ; Rahman, D. ; Mackenzie, D. ; Timko, A. ; Kudo, T. ; Anyadiegwu, C. ; Thiyagarajan, M. ; Chiu, S. ; Romano, A. ; Dammel, R. R. ; Padmanaban, M.

Pub. info.:	Advances in Resist Technology and Processing XXIII. pp.615317-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6153

Conference Proceedings

9. Electrophoretic Deposition of Stabilized Zirconia for Solid Oxide Fuel Cells

Ishihara, T. ; Kudo, T. ; Matsuda, H. ; Mizuhara, Y. ; Takita, Y.

Pub. info.:	Proceedings of the Third International Symposium on Solid Oxide Fuel Cells. pp.65-73, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-4

10.

Conference Proceedings

10. PEB sensitivity studies of ArF resists: II. Polymer and solvent effects

Hong, C.-S. ; Lee, S.-H. ; Kim, W.-K. ; Kudo, T. ; Timko, A. ; Mckenzie, D. ; Anyadiegwu, C. ; Rahman, D.M. ; Lin, G. ; Dammel, R.R. ; Padmanaban, M.

Pub. info.:	Advances in resist technology and processing XXI. pp.1131-1137, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5376

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