Investigation of extreme anneal in SIMOX

Investigation of extreme anneal in SIMOX

Author(s):

Publication title:

Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

96-3

Pub. Year:

1995

Page(from):

63

Page(to):

73

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771535 [1566771536]

Language:

English

Call no.:

E23400/962142

Type:

Conference Proceedings

Details

TDL ID:	ZA00013813
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Silicon-on-Insulator Technology and Devices ; Electrochemical Society Meeting
Conf. info. (Number):	7th ; 187th
Conf. info. (Venue):	Los Angeles, California, USA
Conf. info. (Date):	1996.05.05-1996.05.10

Similar Items:

1 Conference Proceedings Effects of the Chlorine Concentration in the Anneal Ambient on the Contamination and Surface Microroughness in SIMOX Anc, MJ., Krull, W.A., Alles, M.A. Electrochemical Society	7 Conference Proceedings Masks for extreme ultraviolet lithography Vernon,S.P., Kearney,P.A., Tong,W.M., Prisbrey,S., Larson,C., Moore,C.E., Weber,F.J., Cardinale,G.F., Yan,P., … SPIE - The International Society for Optical Engineering
2 Conference Proceedings Implications of thin buried-oxide for SIMOX circuit performance Alles, M., Krull, W., Allen, L. Electrochemical Society	8 Conference Proceedings A promising tool for measuring magnetic fields in stellar photospheres Ryde, N., Richter, M.J. ESA Publications Division
3 Conference Proceedings Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers Tenbroek, B.M., Whiting, G., Lee, M.S.L., Edwards, C.F., Redman-White, W. Electrochemical Society	9 Conference Proceedings Status of Philips' extreme UV source Pankert, J., Bergmann, K., Klein, J., Neff, W., Rosier, O., Seiwert, S., Smith, C., Probst, S., Vaudrevange, D., … SPIE - The International Society of Optical Engineering
4 Conference Proceedings CAVITY FORMATION IN SIMOX STRUCTURES El-Ghor, M. K., Pennycook, S. J., Sjoreen, T. P., White, C. W., Narayan, J. Materials Research Society	10 Conference Proceedings Porous silicon: electrochemical microstructuring, photoluminescence, and covalent modificaiton M. B. Prigozhin, P. Shiwsankar, W. R. Algar, U. J. Krull Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings *HIGH TEMPERATURE ANNEALING OF SIMOX LAYERS: PHYSICAL MECHANISMS OF OXYGEN SEGREGATION Jaussaud, C., Margail, J., Stoemenos, J., Bruel, M. Materials Research Society	11 Conference Proceedings Spectropolarimetry of the classical T Tauri Star T Tau Daou, A.G., Johns-Krull, C.M., Valenti, J.A. ESA Publications Division
6 Conference Proceedings *HIGH TEMPERATURE ANNEALING OF SIMOX LAYERS PHYSICAL MECHANISMS OF OXYGEN SEGREGATION Jaussaud, C., Margail, J., Stoemenos, J., Bruel, M. Materials Research Society	12 Conference Proceedings Investigation of Trapping Properties in SIMOX Films by Photo-Irrduced Current Transient Spectroscopy Papioannou,G., Ioannou-Sougleridis,V., Cristoloveanu,S., Bruel,M., Hemment,P. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12