1.

Conference Proceedings
Conference Proceedings
1. CLEANING OF METAL GATE STACKS FOR THE SUB 90 nm TECHNOLOGY NODE
Snow, J. ; Kraus, H. ; Vermeyen, K. ; Fyen, W. ; Mertens, P. ; Kovacs, F.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.393-399,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
2.

Conference Proceedings
Conference Proceedings
2. INTEGRATION OF HIGH-k GATE DIELECTRICS - WET ETCH CLEANING AND SURFACE CONDITIONING
De Gendt, S. ; Beckx, S. ; Caymax, M. ; Claes, M. ; Conard, T. ; Delabie, A. ; Deweerd, W. ; Hellin, D. ; Kraus, H. ; Onsia, B. ; Parishev, V. ; Puurunen, R. ; Rohr, E. ; Snow, J. ; Tsai, W. ; Van Doome, P. ; Van Elshocht, S. ; Vertommen, J. ; Witters, T. ; Heyns, M.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.67-77,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
3.

Conference Proceedings
Conference Proceedings
3. EUV sources for the alpha-tools [6151-25]
Pankert, J. ; Apetz, R. ; Bergmann, K. ; Damen, M. ; Derra, G. ; Franken, O. ; Jassen, M. ; Jonkers, J. ; Klein, J. ; Kraus, H. ; Krucken, T. ; List, A. ; Loeken, M ; Madex A ; Metzmacher, C ; Neff, W ; Probst, S ; Prummer, R ; Rosier, O ; Schwabe, S ; Seiwert, S ; Siemons, G ; Vaudrevange, D ; Wagemann, D ; Weber, A ; Zink P ; Zitzen, O
Pub. info.: Emerging Lithographic Technologies X.  pp.61510Q-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151