Grating pitch measurements with the molecular measuring machine
- Author(s):
Kramar,J. ( Manufacturing Engineering Lab./National Institute of Standards and Technology ) Jun,J.S. Penzes,W.B. Scire,F. Teague,E.C. Villarrubia,J.S. - Publication title:
- Recent advances in metrology, characterization, and standards for optical digital data disks : 21-22 July 1999, Denver, Colorado
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3806
- Pub. Year:
- 1999
- Page(from):
- 46
- Page(to):
- 53
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432926 [081943292X]
- Language:
- English
- Call no.:
- P63600/3806
- Type:
- Conference Proceedings
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