Katz, A. ; Feingold, A. ; El-Roy, A. ; Moriya, N. ; Pearton, S.J. ; Rusby, A. ; Kovalchick, J. ; Abernathy, C.R. ; Geva, M. ; Lane, E.
Pub. info.:
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.217-228, 1993. Pittsburgh, Pa.. Materials Research Society
Pearton, S. J. ; Ren, F. ; Abernathy, C. R. ; Katz, A. ; Hobson, W. S. ; Chu, S. N. G. ; Kovalchick, J.
Pub. info.:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.491-496, 1990. Pittsburgh, Pa.. Materials Research Society