1.

Conference Proceedings

Conference Proceedings
Yang, W. ; Lowe-Webb, R. ; Korlahalli, R. ; Zhuang, V.G. ; Sasano, H. ; Liu, W. ; Mui, D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.966-976,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
2.

Conference Proceedings

Conference Proceedings
Hoobler, R.J. ; Korlahalli, R. ; Boltich, E. ; Serafin, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.756-764,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
3.

Conference Proceedings

Conference Proceedings
Yedur, S. ; Vuong, V. ; Shivaprasad, D. ; Sarathy, T. P. ; Tabet, M. ; Korlahalli, R. ; Hu, J.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59924I-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992