1.

Conference Proceedings
Conference Proceedings
1. Charged-particle-beam-induced processes and their applicability to mask repair for next-generation lithographies
Koops,H.W.P.
Pub. info.: 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.175-179,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4349
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of the dry resist octavinylsilsesquioxan and its application to three-dimensional electron-beam lithography
Koops,H.W.P. ; Babin,S.V. ; Weber,M. ; Dahm,G. ; Holopkin,A. ; Lyakhov,M.N.
Pub. info.: Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California.  pp.578-587,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2724
3.

Conference Proceedings
Conference Proceedings
3. Proposal for polymer photonic bandgap materials fabricated by dry etching and diffusion
Koops,H.W.P.
Pub. info.: Precision plastic optics for optical storage, displays, imaging, and communications : 30-31 July 1997, San Diego, California.  pp.230-235,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3135
4.

Conference Proceedings
Conference Proceedings
4. Dry resist technology to fabricate optimized microlenses centered to the end of a monomode fiber with electron-beam lithography
Babin,S.V. ; Weber,M. ; Koops,H.W.P.
Pub. info.: Current developments in optical design and optical engineering VI : 5-7 August 1996, Denver, Colorado.  pp.95-101,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2863
5.

Conference Proceedings
Conference Proceedings
5. High-Q photonic band gap resonant cavities:from mm-wave to optical regime
Lin,S.-Y. ; Hietala,V.M. ; Lyo,S.K. ; Koops,H.W.P. ; Villeneuve,P.R. ; Joannopoulos,J.D.
Pub. info.: Physics and Simulation of Optoelectronic Devices IV.  pp.170-175,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2693
6.

Conference Proceedings
Conference Proceedings
6. Photonic crystals built by three-dimensional additive lithography enable integrated optics of high density
Koops,H.W.P.
Pub. info.: Photorefractive Fiber and Crystal Devices: Materials, Optical Properties, and Applications II.  pp.248-256,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2849
7.

Conference Proceedings
Conference Proceedings
7. Three-dimensional additive electron beam lithography
Koops,H.W.P. ; Weber,M. ; Schossler,C. ; Kaja,A.
Pub. info.: Metal/Nonmetal Microsystems: Physics, Technology, and Applications.  pp.388-395,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2780