1.

Conference Proceedings

Conference Proceedings
Kim, Y.-S. ; Hyun, Y.-S. ; Kong, K.-K. ; Kim, H. ; Choi, B.-H.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1388-1394,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings

Conference Proceedings
Hwang, Y.-S. ; Jung, J.-C. ; Park, K.-D. ; Lee, S.-K. ; Kim, J.-S. ; Kong, K.-K. ; Shin, K.-S. ; Ding, S.-J. ; Xiang, Z. ; Neisser, M.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.1119-1125,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
3.

Conference Proceedings

Conference Proceedings
Kim, J.-S. ; Jung, J.-C. ; Kong, K.-K. ; Lee, G.-S. ; Lee, S.-K. ; Hwang, Y.-S. ; Shin, K.-S.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.577-585,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
4.

Conference Proceedings

Conference Proceedings
Lee, S.-K. ; Jung, J.-C. ; Hwang, Y.-S. ; Park, K.-D. ; Kim, J.-S. ; Kong, K.-K. ; Shin, K.-S.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.571-576,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
5.

Conference Proceedings

Conference Proceedings
You, T.-J. ; Kim, H.S. ; Kim, J.-S. ; Kim, S.-K. ; Kim, Y.-D. ; Youn, H.S. ; Kong, K.-K.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1327-1334,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
6.

Conference Proceedings

Conference Proceedings
Kim, S.-K. ; Kim, J.-S. ; Yoo, T.-J. ; Kong, K.-K. ; Yun, H.-S. ; Kim, Y.-D. ; Kim, H.-R. ; Kim, Y.-S. ; Kim, H.S.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1321-1326,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
7.

Conference Proceedings

Conference Proceedings
Kim, Y.-S. ; You, T.J. ; Kim, J.-S. ; Kim, S.-K. ; Kong, K.-K. ; Kim, Y.-D. ; Kim, H.S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.1107-1113,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
8.

Conference Proceedings

Conference Proceedings
Lee, G. ; Kong, K.-K. ; Jung, J.-C. ; Shin, K.-S. ; Kang, J.-H. ; Kim, S.D. ; Choi, Y.-J. ; Choi, S.-J. ; Kim, D.-B. ; Kim, J.-H.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.136-140,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
9.

Conference Proceedings

Conference Proceedings
Jung, J.-C. ; Kong, K.-K. ; Hwang, Y.-S. ; Park, K.-D. ; Lee, S.-K. ; Lee, G.S. ; Kim, J.S. ; Shin, K.-S.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.212-220,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
10.

Conference Proceedings

Conference Proceedings
Kim, J.-S. ; Jung, J.-C. ; Kong, K.-K. ; Kim, H.-R. ; Kim, H.-S.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.761-769,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039