Modeling of Atmospheric Pressure Epitaxial Silicon Reactors

Modeling of Atmospheric Pressure Epitaxial Silicon Reactors

Author(s):

Kommu, Sri kanth ( MEMC Electronic Materials, Inc., St. Peters, MO )
Wilson, Gregory M. ( MEMC Electronic Materials, Inc., St. Peters, MO )
Khomami, Bamin ( Washington University, St. Louis, MO )

Publication title:

AIChE 1999 ANNUAL MEETING

Title of ser.:

AIChE meeting [papers]

Ser. no.:

1999

Pub. Year:

1999

Paper no.:

192b

Pages:

2

Pub. info.:

New York: American Institute of Chemical Engineers

Language:

English

Call no.:

A08000

Type:

Conference Proceedings

Details

TDL ID:	ZA00015170
Series ID:	PA00000179
Conf. info. (Name):	AIChE Annual Meeting
Conf. info. (Number):	1999
Conf. info. (Venue):	Dallas, TX, USA
Conf. info. (Date):	1999.10.31-1999.11.05
Note for article:	Fiche 34

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