1.

Conference Proceedings

Conference Proceedings
Honma., I. ; Tanaka, T. ; Komiyama, H. ; Tanaka, K.
Pub. info.: Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A..  pp.669-674,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 149
2.

Conference Proceedings

Conference Proceedings
Haus, Joseph W. ; Zhou, H.S. ; Honma, I. ; Komiyama, H.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.871-878,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
3.

Conference Proceedings

Conference Proceedings
Zhou, H.S. ; Honma, I. ; Komiyama, H. ; Haus, J.W.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.939-944,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
4.

Conference Proceedings

Conference Proceedings
Sugiyama, M. ; Nakajima, T. ; Tanaka, T. ; Itoh, H. ; Aoyama, J. ; Egashira, Y. ; Yamashita, K. ; Komiyama, H. ; Shimogaki, Y.
Pub. info.: Interconnect and contact metallization for ULSI : proceedings of the international symposium.  pp.56-67,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-31
5.

Conference Proceedings

Conference Proceedings
Hu, M. ; Noda, S. ; Ogawa, F. ; Tsuji, Y. ; Okubo, T. ; Yamaguchi, F ; Komiyama, H.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.41-46,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
6.

Conference Proceedings

Conference Proceedings
Fujino, K. ; Egashira, Y. ; Shimogaki, Y. ; Komiyama, H.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.559-569,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
7.

Conference Proceedings

Conference Proceedings
Endo, A. ; Honma, I. ; Ihara, M. ; Komiyama, H. ; Yamada, K. ; Kajimura, A. ; Sasaki, H. ; Mizusaki, J. ; Tagawa, H.
Pub. info.: Proceedings of the Fourth International Symposium on Solid Oxide Fuel Cells (SOFC-IV).  pp.597-602,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-1
8.

Conference Proceedings

Conference Proceedings
Takeuchi, T. ; Egashira, Y. ; Komiyama, H.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.447-454,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
9.

Conference Proceedings

Conference Proceedings
Saito, T. ; Oshima, K. ; Egashira, Y. ; Shimogaki, Y. ; Komiyama, H. ; Sugarwara, K.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.238-243,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2
10.

Conference Proceedings

Conference Proceedings
Sugiyama, M. ; Shimogaki, Y. ; Sudo, S. ; Nakano, Y. ; Sugawara, K. ; Tada, K. ; Komiyama, H.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.909-916,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25