1.

Conference Proceedings

Conference Proceedings
Horiike, Y. ; Yoshikawa, R. ; Okano, H. ; Nakase, M. ; Komano, H. ; Takigawa, T.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.17-26,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
2.

Conference Proceedings

Conference Proceedings
Horiike, Y. ; Yoshikawa, R. ; Okano, H. ; Nakase, M. ; Komano, H. ; Takigawa, T.
Pub. info.: Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A..  pp.39-48,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 76
3.

Conference Proceedings

Conference Proceedings
Yamaguchi, S. ; Kanai, H. ; Komano, H. ; Sakurai, H. ; Kondo, T. ; Itoh, M. ; Mori, I. ; Higashikawa, I.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.546-556,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
4.

Conference Proceedings

Conference Proceedings
Hamamoto, K. ; Watanabe, T. ; Hada, H. ; Komano, H. ; Kishimura, S. ; Okazaki, S. ; Kinoshita, H.
Pub. info.: Emerging Lithographic Technologies VI.  Part Two  pp.664-671,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
5.

Conference Proceedings

Conference Proceedings
Hada, H. ; Watanabe, T. ; Hamamoto, K. ; Kinoshita, H. ; Komano, H.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.686-694,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374