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Materials issues in applications of amorphous silicon technology : symposium held April 15-17, 1985, San Francisco, California, U.S.A.. pp.209-214, 1985. Pittsburgh, Pa.. Materials Research Society
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EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany. pp.62810S-, 2006. Bellingham, Wash.,. SPIE - The International Society of Optical Engineering
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