Microassembly station with controlled environment
- Author(s):
Zhou, Q. ( Univ. of Technology(Finland) ) Aurelian, A. del Corral, C. Esteban, P.J. Kallio, P. Chang, B. Koivo, H.N. ( Helsinki Univ. of Technology(Finland) ) - Publication title:
- Microrobotics and microassembly III : 29-30 October 2001 Newton
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4568
- Pub. Year:
- 2001
- Page(from):
- 252
- Page(to):
- 260
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442963 [0819442968]
- Language:
- English
- Call no.:
- P63600/4568
- Type:
- Conference Proceedings
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