1.

Conference Proceedings

Conference Proceedings
Bornebroek,F. ; Burghoorn,J. ; Greeneich,J.S. ; Megens,H.J. ; Satriasaputra,D. ; Simons,G. ; Stalnaker,S. ; Koek,B.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.520-531,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings

Conference Proceedings
van,Oorschot,P. ; Koek,B. ; van,der,Spek,J. ; Stuiver,E. ; Franken,H. ; Botter,H. ; Garreis,R.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.423-436,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334