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11 results

Conference Proceedings

1. KINETICS OF CHEMICAL VAPOR DEPOSITION OF COOPER FROM (β-diketonate) CuL PRECURSORS

Jain, Ajay ; Chi, K M. ; Kodas, T. T. ; Hampden-smith, M. J.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.113-118, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

2. MASS SPECTROMETRIC STUDY OF LASER-INDUCED CHEMICAL VAPOR DEPOSITION OF GOLD

Kodas, T. T. ; Comita, P. B.

Pub. info.:	Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.249-254, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	101

Conference Proceedings

3. CHEMICAL VAPOR DEPOSITION OF COPPER FROM METAL-ORGANIC COPPER ( I ) PHOSPHINE COMPLEXES

Shin, H. -K. ; Hampden-Smith, M. J. ; Kodas, T. T. ; Duesler, E.. N. ; Farr, J. D. ; Paffett, M.

Pub. info.:	Thin film structures and phase stability : symposium held April 16-17, 1990, San Francisco, California, U.S.A.. pp.193-198, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	187

Conference Proceedings

4. NEW APPROACHED FOR DRY ETCHING METAL OXIDES AT LOW TEMPERATURE AND HIGH RATES

Rousseau, Francois ; Jain, A. ; Perry, L. ; Kodas, T. T. ; Hampden-Smith, M. J. ; Paffett, M. ; Muenchausen, R.

Pub. info.:	Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A.. pp.59-62, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	268

Conference Proceedings

5. Gas-phase generation of nanometer-sized metal particles for fabrication of zero-dimensional quantum structures

Pluym, Tammy C. ; Kodas, T. T. ; Wang, L. M. ; Wiedensohler, A. ; Hansson, H. C. ; Maximov, I. ; Samuelson, L.

Pub. info.:	III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.465-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	300

Conference Proceedings

6. AEROSOL ROUTES TO PEROVSKITE PHASE MIXED METAL OXIDES

Chandler, C. D. ; Powell, Q. ; Hampden-Smith, M. J. ; Kodas, T. T.

Pub. info.:	Ferroelectric thin films III : symposium held April 13-16, 1993, San Francisco, California, U.S.A.. pp.351-, 1992. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	310

Conference Proceedings

7. Characteristics of Cu-Pd Films Grown by Simultaneous Chemical Vapor Deposition from Metalorganic Precursors

Bhaskaran, V. ; Atanasova, P. ; Hampden-Smith, M. J. ; Kodas, T. T.

Pub. info.:	Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.231-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	427

Conference Proceedings

8. Utilization of β-diketones for etching and cleaning of metal oxide and sulfide thin films

Droes, Steven R. ; Jain, A. ; Kodas, T. T. ; Hampden-Smith, M. J. ; Muenchausen, R.

Pub. info.:	III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.471-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	300

Conference Proceedings

9. PASSIVATION OF SILICON DIOXIDE SURFACE HYDROXYL GROUPS TO CONTROL SELECTIVITY DURING CHEMICAL VAPOR DEPOSITION OF COPPER FROM COPPER(I) COMPOUNDS

Jain, Ajay ; Farkas, J. ; Kodas, T. T. ; Hampden-Smith, M. J. ; Gelatos, A. V. ; Marsh, R. ; Mogab, C. J.

Pub. info.:	Surface chemical cleaning and passivation for semiconductor processing. pp.105-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	315

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Conference Proceedings

10. FTIR STUDIES OF SILICA SURFACE PASSIVATION AND SUBSEQUENT ADSORPTION/DESORPTION BEHAVIOR OF COPPER METALORGANIC PRECURSORS

Farkas, Janos ; Kodas, T. T. ; Hampden-Smith, M. J.

Pub. info.:	Surface chemical cleaning and passivation for semiconductor processing. pp.97-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	315

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Author: Kodas, T. T.