1.

Conference Proceedings

Conference Proceedings
Cho, C.R. ; Kim, Y.S. ; Lee, J.K. ; Ko, S.W. ; Choi, D.J. ; Son, C.B. ; Stephens, A.E. ; Rozgonyi, G.A.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.350-358,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
2.

Conference Proceedings

Conference Proceedings
Cho, C.R. ; Noh, K.Y. ; Lee, D.H. ; Kim, Y.S. ; Ko, S.W. ; Kim, C.W. ; Kim, D.H. ; Son, C.B. ; Kim, S.J. ; Cho, D.H. ; Choi, J.J. ; Kim, D.J. ; Bae, K.M. ; Rozgonyi, G.A.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.201-208,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17