Knowlton, W.B. ; Walton, J.T. ; Lee, J.S. ; Lewak, D. ; Wong, Y.K. ; Haller, E.E.
Pub. info.:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.324-336, 1996. Pennington, NJ. Electrochemical Society
Walton, J.T. ; Haller, B.E. ; Knowlton, W.B. ; Wong, Y.K. ; Ammon, W.V. ; Zuichner, W.
Pub. info.:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.400-411, 1997. Pennington, NJ. Electrochemical Society