Blank Cover Image

SILICON CARBIDE STRUCTURES PREPARED BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Author(s):
Publication title:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
146
Pub. Year:
1989
Page(from):
103
Page(to):
108
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990197 [1558990194]
Language:
English
Call no.:
M23500/146
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF POLYCRYSTALLINE SILICON IN A RAPID THERMAL PROCESSOR

Liao, Jimmy C., Crowley, John L., Kamina, Ted I.

Materials Research Society
7 Conference Proceedings RAPID THERMAL CHEMICAL VAPOR DEPOSITION: SELECTIVE EPITAXIAL SILICON GROWTH (SEG)

Osenback, J. W., Ku, Y. H., Kermani, A.

Materials Research Society
2 Conference Proceedings IN-SITU DOPED POLYCRYSTALLINE SILICON DEPOSITED BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION USING TERTIARYBUTYLPHOSPHINE

Liao, Jimmy C., Kim, Ki-Bum, Maillot, Philippe

Materials Research Society
8 Conference Proceedings *RAPID THERMAL CHEMICAL VAPOR DEPOSITION OF GERMANIUM AND GERMANIUM/SILICON ALLOYS ON SILICON: NEW APPLICATIONS IN THE FABRICATION OF MOS TRANSISTORS

Ozturk, M. C., Grider, D. T., Ashburn, S. P., Sanganeria, M., Wortman, J. J.

Materials Research Society
3 Conference Proceedings SILICON-CARBON RANDOM ALLOY EPITAXY ON SILICON BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Mi, J., Letourneau, P., Ganiere, J. -D., Gailhanou, M., Dutoit, M., Dubois, C., Dupuy, J. C.

MRS - Materials Research Society
9 Conference Proceedings Polymorphous Silicon Nanowires Synthesized by Plasma-Enhanced Chemical Vapor Deposition

Zeng, X.B., Liao, X.B., Diao, H.W., Hu, Z.H., Xu, Y.Y., Zhang, S.B., Chen, C.Y., Chen, W.D., Kong, G.L.

Materials Research Society
4 Conference Proceedings Structural and Optical Properties of SiGeC Alloys and Multi-Quantum Wells Grown by Rapid Thermal Chemical Vapor Deposition

Boucaud, P., Guedj, C., Julien, F. H., Bouchier, D., Boulmer, J., Lourtioz, J. -M., Bodnar, S., Regolini, J. L., …

MRS - Materials Research Society
10 Conference Proceedings GATE QUALITY OXIDES PREPARED BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Kuehn, R. T., Xu, X., Holcombe, D. J., Misra, V., Wortman, J. J., Hauser, J. R., Wang, Q. -F., Maher, D. M.

MRS - Materials Research Society
5 Conference Proceedings Pre-Deposition Treatments for Selective Rapid Thermal Chemical Vapor Deposition of TiSi2 on Arsenic-Implanted Silicon Substrates

Fang, H., Oeztuerk, M.C., O'Neil, P.A., Seebaner, E.

Electrochemical Society
11 Conference Proceedings SUBSTRATE EFFECTS ON THE STRUCTURE AND OPTICAL PROPERTIES OF EPITAXIAL PbTiO3 THIN FILMS PREPARED BY METAL-ORGANIC CHEMICAL VAPOR DEPOSITION

Foster, C. M., Li, Z., Bai, G. R., You, H., Guo, D., Chang, H. L. M.

MRS - Materials Research Society
6 Conference Proceedings WELL-RESOLVED BAND-EDGE PHOTOLUMINESCENCE FROM STRAINED Si1-xGex LAYERS GROWN BY RAPID THERMAL CHEMICAL VAPOR DEPOSITION

Sturm, J.C., Schwartz, P.V., Manoharan, H., Mi, Q., Lenchyshyn, L.C., Thewalt, M.L.W., Rowell. N.L., Noel, J.-P., …

Materials Research Society
12 Conference Proceedings Novel Applications of Rapid Thermal Chemical Vapor Deposition for Nanoscale MOSFET's

Sturm, J. C., Yang, M., Chang, C. L., Carroll, M. S.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12