1.

Conference Proceedings
Conference Proceedings
1. COMPOUND SIDEWALL SPACER TECHNOLOGY FOR SUBMICRON MOSFET
Roy, P.K. ; Kook, T. ; Kizilyalli, I.C. ; Nanda, A.K.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.449-456,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. Stacked Si02-Ta2O5 Gate Dielectrics for CMOS
Kizilyalli, I.C. ; Roy, P.K.
Pub. info.: Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium.  pp.97-103,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-7
3.

Conference Proceedings
Conference Proceedings
3. Non-Contact Characterization of Ultrathin Dielectrics for the Gigabit Era
Roy, P.K. ; Chacon, C. ; Ma, Y. ; Kizilyalli, I.C. ; Horner, O.S. ; Verkuil, R.L. ; Miller, T.G.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.280-294,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-12