1.

Conference Proceedings
Conference Proceedings
1. Process Design and Integration of Salicide and Source/Drain Process Modules for Improved Device Performance
Apte, Pushkar P. ; Saxena, Sharad ; Rao, Suraj ; Vasanth, Karthik ; Prinslow, Douglas A. ; Kittl, Jorge A. ; Breedijk, Terence ; Pollack, Gordon
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.319-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
2.

Conference Proceedings
Conference Proceedings
2. Process Design and Integration of Salicide and Source/Drain Process Modules for Improved Device Performance
Apte, Pushkar P. ; Saxena, Shared ; Rao, Suraj ; Vasanth, Karthik ; Prinslow, Douglas A. ; Kittl, Jorge A. ; Breedijk, Terence ; Pollack, Gordon
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.251-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
3.

Conference Proceedings
Conference Proceedings
3. Applications of Ni-Based Silicides to 45 nm CMOS and Beyond
Kittl, Jorge A. ; Lauwers, Anne ; Chamirian, Oxana ; Pawlak, Malgorzata A. ; Dal, Mark Van ; Akheyar, Amal ; Potter, Muriel De ; Kottantharayil, Anil ; Pourtois, Geoffrey ; Lindsay, Richard ; Maex, Karen
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.31-42,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
4.

Conference Proceedings
Conference Proceedings
4. Silicides for 65 nm CMOS and Beyond
Kittl, Jorge A. ; Lauwers, Anne ; Chamirian, Oxana ; Dal, Mark Van ; Akheyar, Amal ; Richard, Olivier ; Lisoni, Judit G. ; Potter, Muriel De ; Lindsay, Richard ; Maex, Karen
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.267-278,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
5.

Conference Proceedings
Conference Proceedings
5. Ni Silicide Morphology On Small Features
Chamirian, Oxana ; Lauwers, Anne ; Kittl, Jorge A. ; Dal, Mark Van ; Potter, Muriel De ; Vrancken, Christa ; Lindsay, Richard ; Maex, Karen
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.147-152,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
6.

Conference Proceedings
Conference Proceedings
6. Effects of Alloying on Properties of NiSi for CMOS Applications
Dal, Mark van ; Akheyar, Amal ; Kittl, Jorge A. ; Chamirian, Oxana ; Potter, Muriel De ; Demeurisse, Caroline ; Lauwers, Anne ; Maex, Karen
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.153-158,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
7.

Conference Proceedings
Conference Proceedings
7. Process Modeling and Integration of the Salicide Process Module for Sub-Half Micron Technology
Apte, Pushkar P. ; Prinslow, Douglas A. ; Kittl, Jorge A. ; List, R. Scott ; Pollack, Gordon
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.233-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402