1.
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Conference Proceedings
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Hatada, K. ; Kitayama, T. ; Okamoto, Y. ; Yuki, H. ; Aritome, H. ; Namba, S. ; Nate, K. ; Inoue, T. ; Yokono, H.
Pub. info.: |
Materials for microlithography : radiation-sensitive polymers. pp.399-, 1984. Washington, D.C.. American Chemical Society |
Title of ser.: |
ACS symposium series |
Ser. no.: |
266 |
|
2.
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Conference Proceedings
|
Kitayama, T. ; Ishikura, K. ; Hamada, H. ; Kikutani, T. ; Ito, H.
Pub. info.: |
ANTEC 2001, conference proceedings, Dallas, Texas, May 6-10. pp.1972-1975, 2001. Brookfield Center, CT. Society of Plastics Engineers |
Title of ser.: |
Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers |
Ser. no.: |
47 |
|