1.

Conference Proceedings
Conference Proceedings
1. Evaluation and comparison of the pattern transfer-induced image placement distortions on e-beam projection lithography masks
Magg,C. ; Lercel,M.J. ; Lawliss,M. ; Ackel,R. ; Caldwell,N. ; Kindt,L. ; Racette,K.C. ; Williams,C. ; Reu,P.L.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.374-382,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Inspection and repair of EUV
Fisch,E. ; Kindt,L. ; Lercel,M.J. ; Schmidt,M.R.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.480-485,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562