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14 results

Conference Proceedings

1. Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol

Jang,W.-I. ; Choi,C.-A. ; Lee,M.-L. ; Jun,C.-H. ; Kim,Y.T.

Pub. info.:	Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.444-450, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4174

Conference Proceedings

2. Formation of low-stress multilayered thick polysilicon films for fabrication of microsystems

Choi,C.-A. ; Jang,W.-I. ; Lee,M.-L. ; Kim,Y.T.

Pub. info.:	Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA. pp.307-313, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4174

Conference Proceedings

3. Novel process for high reflectivity of Al sidewalls of optical mirrors using KrF excimer laser annealing

Jung,M.-Y. ; Ryu,H. ; Lee,M.-L. ; Jun,C.-H. ; Kim,Y.T.

Pub. info.:	Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.111-118, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4557

Conference Proceedings

4. Fabrication of highly sensitive thermal microflow sensor with surface-micromachined vacuum platform for gas and liquid applications

Jun,C.-H. ; Choi,C.-A. ; Jang,W.I. ; Kim,Y.T.

Pub. info.:	Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.415-422, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4557

Conference Proceedings

5. Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope

Jang,W.I. ; Choi,C.A. ; Hong,Y.S. ; Jun,C.H. ; Kim,Y.T. ; Lee,J.H.

Pub. info.:	Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.332-339, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3892

Conference Proceedings

6. Effects of PECVD W-N diffusion barrier on thermal stress and electrical properties of Cu/W-N/SiOF multilevel interconnect

Kim,Y.T. ; Kim,D.J. ; Lee,S. ; Park,Y.K. ; Kim,I.-S. ; Park,J.-W.

Pub. info.:	In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland. pp.227-233, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3743

Conference Proceedings

7. Thermal flow sensor with vacuum-sealed membrane fabricated by surface micromachining

Jun,C.-H. ; Kim,S.-K. ; Kwag,D.-S. ; Kim,Y.T.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.931-938, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

8. Needle-shaped glucose sensor with multicell electrode fabricated by surface micromachining

Kim,Y.T. ; Kim,Y.-Y. ; Jun,C.-H.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.924-930, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

9. Improvement in diffusion barrier properties of PECVD W-N thin film by low-energy BF2+ implantation

Kim,D.J. ; Kim,Y.T. ; Park,Y.K. ; Sim,H.S. ; Park,J.-W.

Pub. info.:	In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland. pp.324-331, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3743

10.

Conference Proceedings

10. Surface-micromachined electrostatic diaphragm micropump

Jang,W.I. ; Lee,Y.I. ; Choi,C.A. ; Jun,C.H. ; Kim,Y.T.

Pub. info.:	Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.395-402, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3891

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Author: Kim,Y.T.