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18 results

Conference Proceedings

1. Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching

Lee,J.-Y. ; Kim,S.-H. ; Lim,H.-T. ; Kim,C.-H. ; Kim,Y.-K.

Pub. info.:	Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.250-260, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4557

Conference Proceedings

2. Photochemical selective surface modification using micromirror array for biochip fabrication

Lee,K.-N. ; Shin,D.-S. ; Chung,W.-J. ; Lee,Y.-S. ; Kim,Y.-K.

Pub. info.:	Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.352-359, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4557

Conference Proceedings

3. Fabrication of electromagnetic micromirror array

Jang,Y.-H. ; Kim,Y.-K.

Pub. info.:	Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.395-402, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4557

Conference Proceedings

4. Fabrication of vertical-spring-type micromirror with Si02 shielding screen and composite-layered mirror plate

Lim,T.-S. ; Kim,Y.-K.

Pub. info.:	Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.257-264, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3891

Conference Proceedings

5. Reduction of wafer-scale error between DI and FI in multilevel metallization hy adjusting edge detedion method

Bae,S.-G. ; Kim,Y.-K. ; Park,K.-Y. ; Kim,J.-S. ; Lee,W.-G. ; Lee,S.-W. ; Lee,D.-H.

Pub. info.:	Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California. pp.460-469, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3998

Conference Proceedings

6. Fabrication and deflection measurement of micromirrors supported by an S-shape girder

Kim,H. ; Kim,J.-K. ; Kim,Y.-K. ; Shin,H.-J.

Pub. info.:	Diffractive and holographic technologies, systems, and spatical light modulators VI : 27-29 January 1999, San Jose, California. pp.139-147, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3633

Conference Proceedings

7. Integration of a microlens on a micro XY-stage

Kim,C.-H. ; Kim,Y.-K.

Pub. info.:	Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.109-117, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3892

Conference Proceedings

8. Fabrication of freestanding microstructures using UV lithography and double-electroplating technique

Baek,C.-W. ; Kim,Y.-K.

Pub. info.:	Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California. pp.225-232, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3511

Conference Proceedings

9. Novel fabrication of comb actuator using RIE of polysilicon and (110)51 anisotropic bulk etching in KOH

Lim,H.-T. ; Kim,Y.-K.

Pub. info.:	Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California. pp.183-190, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3511

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Conference Proceedings

10. Development of biocompatible micropatterns for single-cell biosensors

Chang,J.K. ; Park,C.Y. ; Choi,J.-H. ; Kim,Y.-K. ; Han,D.C.

Pub. info.:	Proceedings of micro- and nanofbricated electro-optical mechanical systems for biomedical and environmental applications : 10-11 February 1997, San Jose, California. pp.31-40, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2978

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Author: Kim,Y.-K.