Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.250-260, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.352-359, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.395-402, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.257-264, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California. pp.460-469, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Diffractive and holographic technologies, systems, and spatical light modulators VI : 27-29 January 1999, San Jose, California. pp.139-147, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.109-117, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California. pp.225-232, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California. pp.183-190, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of micro- and nanofbricated electro-optical mechanical systems for biomedical and environmental applications : 10-11 February 1997, San Jose, California. pp.31-40, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering