1.

Conference Proceedings

Conference Proceedings
Kang,T.-G. ; Choi,J.-K. ; Park,C.-Y. ; Choi,Y.-W. ; Kim,Y.-C.
Pub. info.: Optoelectronic interconnects VII : photonics packaging and integrations II : 24-26 January 2000, San Jose, California.  pp.31-39,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3952
2.

Conference Proceedings

Conference Proceedings
Lee,S.-J. ; Yoo,J.-Y. ; Kim,Y.-C. ; Kim,H. ; Nam,J.-L. ; Chung,U.-I. ; Kang,G.-W. ; Han,W.-S.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.195-204,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
3.

Conference Proceedings

Conference Proceedings
Kim,Y.-C. ; Vandenberghe,G.N. ; Verhaegen,S. ; Ronse,K.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.954-967,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
4.

Conference Proceedings

Conference Proceedings
Kim,Y.-C. ; Yeo,G.-S. ; Shin,H.-S. ; Kim,H. ; Kang,H.-Y. ; Chung,U-I.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.629-639,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
5.

Conference Proceedings

Conference Proceedings
Kim,Y.-C. ; Song,H. ; Chung,Y.J. ; Kim,J. ; Kuo,C.-C.J.
Pub. info.: Applications of digital image processing XXII : 20-23 July 1999, Denver, Colorado.  pp.118-128,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3808
6.

Conference Proceedings

Conference Proceedings
Vandenberghe,G.N. ; Kim,Y.-C. ; Delvaux,C. ; Lucas,K.D. ; Choi,S.-J. ; Ercken,M. ; Ronse,K. ; Vleeming,B.
Pub. info.: Optical Microlithography XIV.  4346  pp.179-190,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
7.

Conference Proceedings

Conference Proceedings
Oh,S.-C. ; Kim,Y.-C. ; Nah,S.-H. ; Huh,H. ; Han,S.-B.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part2  pp.926-934,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999