Infrared Detectors and Focal Plane Arrays VI : 25-27 April 2000, Orlando, USA. pp.166-172, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part2 pp.528-535, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California. pp.233-240, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California. pp.214-224, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California. pp.297-306, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering