1.

Conference Proceedings
Conference Proceedings
1. HYDROGENATED SILICON FILMS PREPATED BY REMOTE PLASMA CVD
Kim, S. C ; Lee, S. K. ; Soe, S. M. ; Koh, S. O. ; Ihm, S. S. ; Jun, J. M. ; Kim, T. G. ; Chung, M. H. ; Lee, K. H. ; Song, H. K. ; Jang, J. ; Hwang, J. T. ; Chung, K. S.
Pub. info.: Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A..  pp.577-582,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 192
2.

Conference Proceedings
Conference Proceedings
2. Combined absorber stack for optimization of the EUVL mask [6151-71]
Lee, S. Y. ; Kim, T. G. ; Kim, C. Y. ; Kong, I.-Y. ; Chung, Y. C. ; Ahn, J.
Pub. info.: Emerging Lithographic Technologies X.  pp.61511Y-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151