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27 results

Conference Proceedings

1. Plastic thermally controllable platform with integrated thin film microcomponents

Lee, D.-S. ; Chung, K.-H. ; Yang, H. ; Park, S. H. ; Kim, S.-J. ; Pyo, H.-B.

Pub. info.:	Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. pp.429-437, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5650

Conference Proceedings

2. Binary phase-based optical encryption system using interferometer

Seo, D.-H. ; Shin, C.-M. ; Kim, J.-Y. ; Kim, C.-S. ; Kim, J.-W. ; Kim, S.-J.

Pub. info.:	Optical pattern recognition XIII : 2 April, 2002, Orlando, USA. pp.82-89, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4734

Conference Proceedings

3. New approach for 193-nm resist using modified cycloolefin resin

Park, J.H. ; Seo, D.C. ; Kim, C.-M. ; Lim, Y.-T. ; Cho, S.-D. ; Lee, J.B. ; Joo,H.-S. ; Jeon, H.-P. ; Kim, S.-J. ; Jung, J.-C. ; Shin, K.-S. ; Kong, K.K. ; Yamada, T.

Pub. info.:	Advances in Resist Technology and Processing XIX. Part One pp.120-126, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4690

Conference Proceedings

4. Effect of Diamond-Like Carbon Overcoats on VOR Performance

Lee, J.-W ; Kim, S.H. ; Park, Y.S. ; Shinn, M.N. ; Kang, D.H. ; Voon, S.Y ; Kim, D.S. ; Park, T.S. ; Ha, S.H. ; Lee, J.-H. ; Kim, S.-J.

Pub. info.:	Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS). pp.91-102, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-18

Conference Proceedings

5. Equal Channel Angular Pressing of Metallic Powders

Kim, H.S. ; Seo, M.H. ; Oh, C.-S. ; Kim, S.-J.

Pub. info.:	Advanced materials processing II : proceedings of the 2nd International Conference on Advanced Materials Processing, Grand Hyatt, Singapore, 2nd-4th December 2002. pp.89-92, 2003. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	437-438

Conference Proceedings

6. Successful application of angular scatterometry to process control in sub-100-nm DRAM device

Kim, J.- ; Kim, S.-J. ; Chin, S.-B. ; Oh, S.-H. ; Goo, D.-H. ; Lee, S.-J. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T. ; Raymond, C.J. ; Littau, M.E. ; Youn, B.J. ; Sohn, C.-J.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVIII. pp.541-549, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5375

Conference Proceedings

7. New approach for pattern collapse problem by increasing contact area at sub-100nm patterning

Lee, S.-K. ; Jung, J.C. ; Lee, M.S. ; Lee, S.K. ; Kim, S.Y. ; Hwang, Y.-S. ; Bok, C.K. ; Moon, S.-C. ; Shin, K.S. ; Kim, S.-J.

Pub. info.:	Advances in resist technology and processing XX. 1 pp.166-174, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5039

Conference Proceedings

8. Novel approach for high resolution using cycloolefin-alt-maleic acid derivatives polymer for ArF lithography

Lee, J.-B. ; Park, J.-H. ; Seo, D.-C. ; Kim, C.-M. ; Lim, Y.-T. ; Cho, S.-D. ; Joo, H.-S. ; Jeon, H.-P. ; Kim, S.-J.

Pub. info.:	Advances in Resist Technology and Processing XIX. Part Two pp.623-630, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4690

Conference Proceedings

9. Toward enhanced data consistency in distributed virtual environments

Kim, S.-J. ; Kuester, F. ; Kim, K.H.

Pub. info.:	Stereoscopic Displays and Virtual Reality Systems X. pp.436-444, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5006

10.

Conference Proceedings

10. High-speed high-power traveling-wave distributed photodetectors with backward wave cancellation (Invited Paper)

Murthy, S. ; Kim, S.-J. ; Jung, T. ; Wang, Z. ; Hsin, W. ; Wu, M. C.

Pub. info.:	Active and passive optical components for WDM communications III : 8-11 September, 2003, Orlando, Florida, USA. pp.491-500, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5246

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