1.

Conference Proceedings
Conference Proceedings
1. In-Situ Oxygen Plasma Enhancement for Coherent Ti/TiN Barrier Metal Application
Lee, K.-B. ; Kwak, N.-J. ; Kim, S.-D. ; Kim, C.-T. ; Fu, J. ; Nahm, M.K. ; Diaz, R. ; Lai, C.S. ; Xu, Z. ; Han, B.B. ; Park, J.-G. ; Jang, W.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.333-338,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
2.

Conference Proceedings
Conference Proceedings
2. Low Temperature Plasma Treatment of Ta2O5 Films for W Electrode Metal-Insulator-Metal (MIM) Capacitor
Oh, S.-J. ; Ku, J.-C. ; Kim, S.-B. ; Kim, S.-D. ; Kim, C.-T.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.177-180,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
3.

Conference Proceedings
Conference Proceedings
3. Improved point distribution model with curvature for boundary finding
Choi, H.-C. ; Kim, S.-D.
Pub. info.: Visual communications and image processing 2002 : 21-23 January 2002, San Jose, USA.  pp.1115-1124,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4671