1.
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Conference Proceedings
|
Kim, D. Y. ; Cho, W. I. ; Park, J. H. ; Chung, D. H. ; Cha, B. C. ; Choi, S. W. ; Han, W. S. ; Park, K. H. ; Kim, N. W. ; Hess, C. ; Ma, W. ; Kim, D.
Pub. info.: |
25th Annual BACUS Symposium on Photomask Technology. pp.599209-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5992 |
|
2.
|
Conference Proceedings
|
Kim, H. Y. ; Hwang, D. H. ; Kim, S. P. ; Han, O. ; Park, K. H. ; Kim, N. W. ; Kim, D.
Pub. info.: |
Photomask Technology 2006. pp.63493Q-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6349 |
|