Bae, K-M. ; Kim, J-R. ; Hong, Y-K. ; So, S-I. ; Lee, S-C. ; Kim, S-S. ; Ha, S-W. ; Koh, C-G. ; Pyi, S-H. ; Lee, D-M.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.786-792, 2002. Pennington, NJ. Electrochemical Society
Bae, K-M. ; Kim, J-R. ; Hong, Y-K. ; So, S-I. ; Lee, S-C. ; Kim, S-S. ; Ha, S-W. ; Koh, C-G. ; Pyi, S-H. ; Lee, D-M.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.786-792, 2002. Pennington, NJ. Electrochemical Society