1.
Conference Proceedings |
Lee, J W ; Oh, S K ; Kim, J W ; Lee, S H ; Jeong, Y H ; Kim, S S ; Park, M H ; Kim, D ; Kim, J ; Lee, G ; Moon, S C
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2.
Conference Proceedings |
2. Resolution enhanced top anti-reflective coating materials for ArF immersion lithography [6153-74]
Jung, J C ; Lee, S K ; Ban, K D ; Bok C ; Kim H S ; Moon, S C ; Kim, J
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3.
Conference Proceedings |
Lim, H. ; Kim, D. ; Ahn, J. ; Lee, D. ; Lee, J. ; Park, H. ; Kim, J ; Han, J.
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