Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.405-414, 2001. Pennington, N.J.. Electrochemical Society
Jung, K.H. ; Cho, N.I. ; Lee, J.H. ; Yang, S.J. ; Kim, C.K. ; Lee, B.-T. ; Rim, K.H. ; Kim, N.-K. ; Kim, E.-D.
Pub. info.:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.913-916, 2002. Zuerich, Switzerland. Trans Tech Publications
Jung, K.H. ; Cho, N.I. ; Lee, J.H. ; Yang, S.J. ; Kim, C.K. ; Lee, B.-T. ; Rim, K.H. ; Kim, N.-K. ; Kim, E.-D.
Pub. info.:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.913-916, 2002. Zuerich, Switzerland. Trans Tech Publications
Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003. pp.913-916, 2004. Zuerich. Trans Tech Publications