1.

Conference Proceedings
Conference Proceedings
1. Submillimeter limb-emission sounder JEM/SMILES aboard the space station
Inatani,J. ; Ozeki,H. ; Satoh,R. ; Nishibori,T. ; Ikeda,N. ; Fujii,Y. ; Nakajima,T. ; Iida,Y. ; Iida,T. ; Kikuchi,K. ; Miura,T. ; Masuko,H. ; Manabe,T. ; Ochiai,S. ; Seta,M. ; Irimajiri,Y. ; Kasai,Y. ; Suzuki,M. ; Shirai,T. ; Tsujimaru,S.
Pub. info.: Microwave remote sensing of the atmosphere and environment II : 9-12 October 2000, Sendai, Japan.  pp.243-254,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4152
2.

Conference Proceedings
Conference Proceedings
2. Method of expanding process window for the double exposure technique with alt-PSMs
Kikuchi,K. ; Ohnuma,H. ; Kawahira,H.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.121-131,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
3.

Conference Proceedings
Conference Proceedings
3. Spaceborne 640-GHz SIS receiver based on a 4-K mechanical cooler
Fujii,Y. ; Kikuchi,K. ; Inatani,J. ; Irimajiri,Y. ; Seta,M. ; Ochiai,S. ; Manabe,T. ; Masuko,H. ; Noguchi,T. ; Narasaki,K. ; Tsunematsu,S. ; Shirota,T.
Pub. info.: UV, optical, and IR space telescopes and instruments : 29-31 March 2000, Munich, Germany.  pp.90-99,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4013
4.

Conference Proceedings
Conference Proceedings
4. Development of superconducting submillimeter-wave limb emission sounder (JEM/SMILES) aboard the International Space Station
Ozeki,H. ; Inatani,J. ; Satoh,R. ; Nishibori,T. ; Ikeda,N. ; Fujii,Y. ; Nakajima,T. ; Iida,Y. ; Iida,T. ; Kikuchi,K. ; Miura,T. ; Masuko,H. ; Manabe,T. ; Ochiai,S. ; Seta,M. ; Irimajiri,Y. ; Kasai,Y. ; Suzuki,M. ; Shirai,T. ; Tsujimaru,S.
Pub. info.: Sensors, systems, and next-generation satellites V : 17-20 September 2001, Toulouse, France.  pp.209-220,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4540
5.

Conference Proceedings
Conference Proceedings
5. Infrared imaging spectrometry by the use of bundled chalcogenide glass fibers and a PtSi CCD camera
Saito,M. ; Kikuchi,K. ; Tanaka,C. ; Sone,H. ; Morimoto,S. ; Yamashita,T.T. ; Nishii,J.
Pub. info.: Imaging spectrometry V : 19-21 July 1999, Denver, Colorado.  pp.475-483,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3753
6.

Conference Proceedings
Conference Proceedings
6. New optimization method of exposure with alternative phase-shifting masks
Kikuchi,K. ; Ohnuma,H. ; Kawahira,H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.41-51,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
7.

Conference Proceedings
Conference Proceedings
7. New method for reducing across chip poly-CD variation with statistical OPC/gauge capability analysis
Ohnuma,H. ; Kikuchi,K. ; Kawahira,H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.362-367,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562