METAL GATES FOR ADVANCED CMOS TECHNOLOGIES
- Author(s):
KiTTL, J. A. 1 PAWLAK, M. A. LAUWERS, A. SCHRAM, T. POURTOIS, G. VELOSO, A. Yu, H. HOFFMANN, T. DEMEURISSE, C. VRANCKEN, C. DE GENDT,S. ABSIL, P. BIESEMANS, S. - Publication title:
- Semiconductor technology (ISTC 2006) : proceedings of the 5th International Conference on Semiconductor Technology
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2006-03
- Pub. Year:
- 2006
- Page(from):
- 258
- Page(to):
- 267
- Pages:
- 10
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774376 [1566774373]
- Language:
- English
- Call no.:
- E23400/200603
- Type:
- Conference Proceedings
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