Blank Cover Image

Real-time control of photoresist thickness uniformity during the bake process

Author(s):
Publication title:
Process Control and Diagnostics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4182
Pub. Year:
2000
Page(from):
54
Page(to):
64
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438430 [081943843X]
Language:
English
Call no.:
P63600/4182
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Real-time control of photoresist development process

Tay, A., Ho, W. -K., Kiew, C. -M., Zhou, Y., Lee, J. H.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Real-time optical CD metrology for litho process

Opsal, J.L., Wen, Y., Lee, J., Smith, W.L.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings CD uniformity control via real-time control of photoresist properties

M. Chen, J. Fu, W. K. Ho, A. Tay

Society of Photo-optical Instrumentation Engineers
8 Conference Proceedings Spatially programmable temperature control and measurement for chemically amplified photoresist processing

Schaper,C.D., EI-Awady,K.A., Tay,A.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Global CD uniformity improvement for CAR masks by adaptive post-exposure bake with CD measurement feedback

Berger, L., Saule, W., Dress, P., Gairing, T.M., Chen, C.-J., Lee, H.-C., Hsieh, H.-C.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings A novel post exposure bake technique to improve CD uniformity over product wafers

Taylor, J. C., Shayib, R., Goh, S., Chambers, C. R., Conley, W., Lin, S.-H., Willson, C. G.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Iterative Feedback Tuning Control of Photoresist Film Thickness Uniformity

Ying Zhou, Weng-Khuen Ho, Arthur Tay, Jiewen Deng, Boon-Keng Lok

American Institute of Chemical Engineers
10 Conference Proceedings IMPROVEMENT OF TEMPERATURE UNIFORMITY IN RAPID THERMAL PROCESSING SYSTEMS USING MULTIVARIABLE CONTROL

Norman, S. A., Schaper, C. D., Boyd, S. P.

Materials Research Society
5 Conference Proceedings Real-time control of photoresist absorption coefficient uniformity

Tay, A., Ho, W. -K., Wu, X., Tsai, K. -Y.

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Robotics Vector Processor Architecture for Real-Time Control

Orin E. D., Sadayappan P., Olson W. K., Ling C. l. Y.

Springer-Verlag
6 Conference Proceedings Characterization of resist flow process for the improvement of contact hole CD uniformity

Koh, C.-W., Lee, D.-H., Kim, M.-S., Park, S.-N., Kwon, W.-T.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Real-time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor

Lee, C. Y., Wu, T. T., Chen, Y. Y., Cheng, Y. C., Chen, W. J., Pao, S. Y., Chang, P. Z., Chen, P. H., Yen, K. H., Xiao, …

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12